Abatement technology just became a smaller issue.

Abatech manufactures the RPM-12 point of use scrubber for CVD/etch semiconductor, commercial and industrial applications, and the Silanator for silane treatment.

RPM-12 POU Scrubber | Silanator

RPM-12 POU Scrubber

Design

The RPM-12 is a co-current/counter-current wet scrubber. The rotary element replaces conventional "packing" used in other wet scrubbers. The rotary element creates high turbulence and intimate mixing between the scrubbing liquid and the exhaust gas. No solids accumulate inside the scrubber. No recirculation and no pH control are necessary. No pressure drop or rise at normal flows up to 10 cfm. Flexible framing options to accomodate space constraints.

Efficiency

Abatement Includes: NH3, HBr, HCl, HF, HNO3, TCS, DCS, metal halides, diatomic halogen gases, and silane (using the Silanator™). 99.9% efficiency at normal loads up to 10 cfm (280 lpm) verified by independent testing company. Applications include abatement of acids, ammonia, breathing, venting, or repack exhaust streams. Space efficiency: approximate 2-foot cube and 165 lbs. The RPM-12 will fit where conventional packed bed scrubbers will not. It is suitable for indoor (clean area) or outdoor installation.

Safety, Reliability, and Maintenance

The RPM-12 uses 0.5kW of power on a 120 VAC, 10 amp circuit. Reclaimed, or domestic feed water at 40 psig is sufficient to maintain 2.5 gpm for maximum efficiency. A vented gravity drain is required. An inert gas flow of 0-10 cfm is necessary for safe startup and shutdown. Most replacement parts are available from industrial supply sources.

Silanator

The Silanator™ is a new, inexpensive, patented technology for silane destruction without burning. More importantly, the Silanator eliminates particulate formation. Successfully tested at a major Texas semiconductor facility. More accurately described as a flexible technology than a single piece of equipment. The Silanator™ can be configured and produced for your application because several geometries and flow rate capabilities are available.

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