Abatement technology just became a smaller issue.

Abatech manufactures the RPM-12 point of use scrubber for CVD/etch semiconductor applications, the Silanator for silane treatment, and the RPM-18 fume scrubber for commercial and industrial applications.

RPM-12 POU Scrubber | RPM-18 Fume Scrubber | Silanator

RPM-12 POU Scrubber

Design

• The RPM-12 is a co-current/counter-current wet scrubber.
• The rotary element replaces conventional "packing" used in other wet scrubbers.
• The rotary element creates high turbulence and intimate mixing between the scrubbing liquid and the exhaust gas.
  
• The inlet system is mechanically self-cleaning.
• No solids accumulate inside the scrubber.
• No recirculation and no pH control are necessary.
• No pressure drop or rise at normal flows up to 10 cfm.


• Abatement includes: NH3, HBr, HCl, HF, HNO3, TCS, DCS, metal halides, diatomic halogen gases, and silane (using the Silanator™).
• 99.9% efficiency at normal loads up to 10 cfm (280 lpm) verified by independent testing company.


• Space efficiency: approximate 2-foot cube and 165 lbs. The RPM-12 will fit where conventional packed bed scrubbers will not. It is suitable for indoor (clean area) or outdoor installation.

Safety, Reliability, and Maintenance

• The RPM-12 uses 0.5kW of power on a 120 VAC, 10 amp circuit.
• Reclaimed, or domestic feed water at 40 psig is sufficient to maintain 2.5 gpm for maximum efficiency.
• A vented gravity drain is required.
• An inert gas flow of 0-10 cfm is necessary for safe startup and shutdown.

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RPM-18 Fume Scrubber

Design

• The RPM-18 has the same operating design and size as the RPM-12, but it uses lower cost materials of construction where the unique requirements of the semiconductor industry are not necessary. For example, the heated, mechanically self-cleaning inlet is not required in most fume scrubber applications.
• The RPM-18 is lighter and has more flexible framing options.


• Abatement includes: acids, ammonia, breathing, venting, or repack exhaust streams.

Safety, Reliability, and Maintenance

• The utility requirements are identical to the RPM-12.
• Most replacement parts are available from industrial supply sources.

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Silanator

The Silanator™ is a new, inexpensive, patented technology for silane destruction without burning. More importantly, the Silanator eliminates particulate formation. The Silanator™ was successfully tested at a major Texas semiconductor facility. The Silanator™ weighs less than 25 pounds and is contained within a 2 foot cube. The Silanator™ is more accurately described as a flexible technology than a single piece of equipment. The Silanator™ can be configured and produced for your application because several geometries and flow rate capabilities are available.

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