Consulting Services

Exhaust system analysis.
We help clients identify appropriate point-of-use scrubbers based on CVD and etch reactor surveys. We recommend methods to eliminate exhaust plumes and to remove solids deposits from central systems.

Design of central exhaust systems that includes end-of-pipe scrubbers.
We help clients design augmentation to central exhaust systems for fab expansions and process equipment upgrades. We also design efficient end-of-pipe scrubber systems that reduce power consumption and do not require demister pads, thus eliminating shutdown for algae removal.

Contamination source identification.
We help clients identify sources of chlorine contamination, and sources of contamination in CMP slurries. When sources are identified we also make recommendations on solutions.